| 摘要 |
PROBLEM TO BE SOLVED: To provide a touch probe having: a long stylus with a small diameter; little probability of being damaged by impact generated by contact between a measuring object and the stylus; and excellent detection accuracy. SOLUTION: This touch probe 1 is equipped with: a cylindrical probe body 10; a stylus support means 11 provided on the probe body 10; the rod-shaped stylus 12 whose approximate center position of gravity 122 is supported by the stylus support means 11; and a detection means 13 for detecting displacement of the stylus 12. The stylus support means 11 is equipped with a diaphragm 111 formed from an elastic member. The diaphragm 111 is equipped with; a center part 113 for supporting the stylus 12; an outer peripheral part 114 fixed to the probe body 10; and a plurality of rims 115 provided radially between the center part 113 and the outer peripheral part 114, for connecting the center part 113 to the outer peripheral part 114. COPYRIGHT: (C)2008,JPO&INPIT |
