| 摘要 |
PROBLEM TO BE SOLVED: To easily and certainly communicate information about a substrate between an operator of a manufacturing line and an inspection person in a substrate inspection device, in a substrate inspection system. SOLUTION: The substrate inspection system 1 comprises a C/D 6, an exposure machine 7, an auto macro inspection device 9, and a conveyance loader 5. The auto macro inspection device 9 comprises a data storage section for storing image data in inspecting the substrate 2 together with a substrate ID and additive input data disposed addably and rewritably every substrate 2, and a data display section for displaying each data stored in the data storage section. Input/output terminals 8A and 8B for inputting the additive input data and displaying each data stored in the data storage section by being connected to the data storage section data-communicatably, are arranged near the C/D 6 and exposure machine 7. COPYRIGHT: (C)2008,JPO&INPIT
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