| 摘要 |
PROBLEM TO BE SOLVED: To obtain an image forming apparatus of high image quality for measuring the potential distribution, with respect to a sample, which has the surface potential distribution of a latent image carrier (photoreceptor), or the like, used in the image forming apparatus, such as a copying machine, or the like, with a micron-order high resolving power. SOLUTION: An electron beam is scanned in a charge particle optical system 10 by applying potential to the back of the sample SP of the photoreceptor. The primary electrons that have turned around from the sample SP are detected by a charged particle capturing device 24, and the coincidence degree of the region, absorbed by the sample SP having photoconductivity and not arriving at the charged particle capturing device 24 with a predictible shape, is determined, and the contour of the region is extracted for determination. The product of the contour with a function, which is largest in the value of the part of an oval contour that is of a predictible shape sandwhich becomes small, as separating therefrom, is taken, and the value obtained by dividing the product by the approximate value of the circumferential value of the oval contour is set as the degree of matching. COPYRIGHT: (C)2008,JPO&INPIT
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