发明名称 Method For Manufacturing Semiconductor Device
摘要 A semiconductor device manufacturing method including forming a dummy capacitor in a fuse region to avoid a step height between plate electrodes in a cell region and in a fuse region, is disclosed herein. The method can be used so that only an insulating film at a target thickness may remain on an upper part of the plate electrode in the fuse region during an etching process for forming a fuse open region, and a fuse failure due to laser blowing can be prevented.
申请公布号 US2008081408(A1) 申请公布日期 2008.04.03
申请号 US20070770999 申请日期 2007.06.29
申请人 SONG MYUNG HWAN 发明人 SONG MYUNG HWAN
分类号 H01L21/8242 主分类号 H01L21/8242
代理机构 代理人
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