发明名称 STRAIN MEASURING DEVICE
摘要 A strain measuring device according to the present invention includes a bridged circuit comprising a p-type impurity diffused resistor as a strain detective portion and a bridged circuit comprising an n-type impurity diffused resistor as a strain detective portion in a semiconductor single crystalline substrate, and sheet resistance of the p-type impurity diffused resistor is 1.67 to 5 times higher than that of the n-type impurity diffused resistor. Furthermore, it is preferable that the impurity diffused resistor be configured to be a meander shape comprising strip lines and connecting portions. Moreover, it is preferable that the number of strip lines in the p-type impurity diffused resistor be smaller than that in the n-type impurity diffused resistor.
申请公布号 US2008079531(A1) 申请公布日期 2008.04.03
申请号 US20070844374 申请日期 2007.08.24
申请人 OHTA HIROYUKI;SHIMAZU HIROMI;TANNO YOHEI 发明人 OHTA HIROYUKI;SHIMAZU HIROMI;TANNO YOHEI
分类号 G01L1/22 主分类号 G01L1/22
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