Resonator which functions with acoustic volume wave has resonator area, which comprises of two electrodes and piezoelectric layer, which is arranged between electrodes

摘要

The resonator which functions with acoustic volume wave has a resonator area (RE) and an acoustic mirror. The resonator area has two electrodes (E1,E2), and a piezoelectric layer (PS), which is arranged between the electrodes. Another electrode is arranged between the mirror (AS) and the piezoelectric layer and has a highly conductive layer (E11,E23) and two growth layers (E21,E22) which are different. The growth layers are arranged between the highly conductive layer of another electrode and the piezoelectric layer. The electrode has an adaptation layer (E12), which contains titanium.