Flüssigkeitsgekühlter Kühlkörper und zugehöriges Herstellungsverfahren

摘要

A heat sink is obtained that has high thermal conductivity as well as satisfactory moldability and corrosion resistance by using a malleable material made of aluminum or aluminum alloy. Liquid cooled heat sink (11) has a passage (23) in which coolant is able to pass, and is joined to a ceramic substrate. A plurality of through holes (12) extending from one end to the other end are formed by a plurality of dividing walls (13) through (15) in flat casing (12) of which both ends are open, and notches (16) are formed on one or both ends of the plurality of dividing walls. Corrugated fins (17) are, respectively, inserted into each of the plurality of through holes, and each through hole is demarcated into a plurality of slots (12b) extending from one end to the other end of the casing by these fins. Both ends of the casing are closed by a pair of covers (18) and (19), and coolant inlet (18a) and outlet (18b) are formed in the covers. The above passage is formed by communication of the notches and slots, and the above inlet and outlet are positioned on both ends of the passage.