发明名称 A GATE ELECTRODE OF GATE GROUND N-TYPE METAL OXIDE SEMICONDUCTOR FIELD EFFECTIVE TRANSISTOR AND A CIRCUIT FOR PROTECTING ELECTRO-STATIC DISCHARGE WITH THE SAME
摘要 A gate electrode of a ground gate transistor and a static-electricity discharge prevention circuit having the same are provided to simplify a process and prevent a short between a gate electrode and an active area by restraining a damage of gate oxide layer. A gate electrode(110) of a ground gate transistor includes a body part and a comb-teeth part. The comb-teeth part is prolonged in a direction vertical to the body part and coupled to the body part. A portion of the comb-teeth part coupled to the body part is formed in a width-increased type in a diagonal shape with a given slope. The slope has an angle of 5~60°. The body part is formed in an inactive area(130). The comb-teeth part is formed in the inactive area and an active area(120). The body part and the comb-teeth part are formed of a polysilicon layer. In the comb-teeth part, a width of portion coupled to the body part is larger than a width of another side.
申请公布号 KR20080029623(A) 申请公布日期 2008.04.03
申请号 KR20060096472 申请日期 2006.09.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SEO, JU WAN
分类号 H01L27/04 主分类号 H01L27/04
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