| 发明名称 |
YTTERBIUM OXIDE-CONTAINING OXIDE TARGET |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxide target having high electric conductivity and free from abnormal discharge and surface blackening. <P>SOLUTION: An oxide target includes indium (In) and ytterbium (Yb). The oxide target is characterized in including an oxide expressed as YbInO<SB>3</SB>. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2008075124(A) |
申请公布日期 |
2008.04.03 |
| 申请号 |
JP20060255381 |
申请日期 |
2006.09.21 |
| 申请人 |
IDEMITSU KOSAN CO LTD |
发明人 |
INOUE KAZUYOSHI;TANAKA NOBUO |
| 分类号 |
C23C14/34;C04B35/457;C04B35/50;C23C14/08;H01B13/00 |
主分类号 |
C23C14/34 |
| 代理机构 |
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