发明名称 MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND CONTROL METHOD OF ELECTRONIC DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electronic device and a control method of the electronic device, capable of prolonging the life of a capacitor. <P>SOLUTION: The manufacturing method of an electronic device comprises a process (step S10) of applying first polarity DC voltage to a capacitor including an insulating film containing nitrogen and silicon as a capacitor dielectric film; a process (step S11) of testing the capacitor to which the first polarity DC voltage is applied and selecting a good or bad capacitor; and a process (step S14) of applying second polarity DC voltage opposite to the first DC voltage to the good capacitor. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008078562(A) 申请公布日期 2008.04.03
申请号 JP20060258933 申请日期 2006.09.25
申请人 EUDYNA DEVICES INC 发明人 KAGIYAMA TOMOHIRO;TOSAKA YASUHIRO;IWAGAMI TETSUKAZU
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
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