| 摘要 |
PROBLEM TO BE SOLVED: To provide a local cleaning device protecting a part to be kept clean of each cleaning object in a clean room, from surrounding pollution and preventing pollution generated from the cleaning object itself from being diffused around. SOLUTION: The local cleaning device 1 provided in the clean room 2 comprises a blowoff device 5 and a suction device 6. The blowoff device 5 is constituted by mounting a blowoff unit 11 having a blowoff surface, and a blower unit 10 comprising a blower 18 for sucking air and supplying the air into the blowoff unit 11, and a filter for cleaning the sucked air, on a device body movable by casters 24. The suction device 6 is constituted by mounting a suction unit 16 having a suction surface, and an air suction unit 15 comprising an air suction machine 26 sucking air from the suction unit 16 and exhausting the air into the clean room 2, and a filter for cleaning the air, on a device body movable by casters 32. The blowoff device 5 and the suction device 6 are arranged to hold the object 3 for cleaning between them. COPYRIGHT: (C)2008,JPO&INPIT
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