THERMOCOUPLE EMBEDDED HIGH POWER DEVICE AND THE METHOD FOR MANUFACTURING THE SAME

摘要

A high power device having a thermocouple and a method for manufacturing the same are provided to measure stably a highest level of temperature thereof by forming a thermocouple at a periphery thereof. A high power device comprises a heating body, a thermocouple, and a dielectric. The thermocouple is formed to approach the heating body. The dielectric is formed between the heating body and the thermocouple. The thermocouple includes a first and second thin films(112A,113A) which are composed of two kinds of metals or alloys. Ends of sides of the first and second thin films are connected to each other to form a lateral contact point. A via contact is connected to the thermocouple. A pad is formed to connect the via contact with an external lead frame.