发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A method for manufacturing a semiconductor device is provided to prevent a void from being formed in an interlayer dielectric, which is formed on a dummy bit line, by increasing a size of peripheral region around a dummy bit line. A dummy bit line(33) is formed at the outside of a last cell to prevent the collapse of a bit line and a bit line of the layers cell is reliably formed. The dummy bit line includes a first pattern(31) and a pair of second patterns(32). The first pattern has a frame-like shape. The second pattern is arranged in the frame-like first pattern and has a hammer-like shape. Widest portions of the second patterns are arranged in opposite directions with respect to each other.
申请公布号 KR20080029665(A) 申请公布日期 2008.04.03
申请号 KR20060096540 申请日期 2006.09.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 YOON, YANG HAN
分类号 H01L21/28;H01L21/3213 主分类号 H01L21/28
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