SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing system capable of preventing a mistake in setting a recipe and reducing a recipe set time.

SOLUTION: In a group management program 40 executed by a group managing device 20, a recipe storage part 408 stores a plurality of recipes in which procedures for treating a substrate are described. A matrix storage part 402 stores correspondence (recipe determination matrix) between lot information and the recipe. A lot information reception part 404 receives the lot information which has been sent. A recipe selection part 406 selects a recipe among a plurality of the recipes stored in the recipe storage part 408 based on the lot information received by the lot information reception part 404 and the recipe determination matrix stored in the matrix storage part 402. A recipe transmission part 410 sends the recipe selected by the recipe selection part 406 to a recipe processing device 10.

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