| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain built-in of a capacitor element which has high capacity of capacitance density, between layers of a multi-layer wiring board with proper productivity at low cost, while the reliability and proper yield are ensured in the built-in of the capacitor element. <P>SOLUTION: In the capacitor element, a second electrode is formed on a dielectric sheet, which has been formed by continuous film formation of a diffusion preventing layer and a dielectric layer on a copper foil. After a dielectric sheet, having four-layer structure made up of a first electrode, a diffusion preventing layer, a dielectric layer, and a second electrode has been laminated on a wiring board in the middle of lamination, the copper foil is etched, and the capacitor element is separated on the wiring board in the middle of lamination. Then, an insulating layer is formed on the capacitor element, and by having the capacitor element is connected to a wiring pattern via a via hole formed on the electrode of the capacitor element, the capacitor element is incorporated in the wiring board. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
