| 发明名称 |
GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY |
| 摘要 |
The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.
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| 申请公布号 |
US2008080782(A1) |
申请公布日期 |
2008.04.03 |
| 申请号 |
US20070934485 |
申请日期 |
2007.11.02 |
| 申请人 |
MICRONIC LASER SYSTEMS AB |
发明人 |
OLSSON MARTIN;GUSTAVSON STEFAN;SANDSTROM TORBJORN;ELMFORS PER |
| 分类号 |
G02B26/08;G06K9/40;G03F1/14;G03F7/20;G06T15/00;H01L21/027 |
主分类号 |
G02B26/08 |
| 代理机构 |
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| 主权项 |
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