| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an impurity reducing method of preventing other than members made of quartz from corroding and also reducing impurities in quartz members. <P>SOLUTION: The impurity reducing method includes a step of supplying two kinds of gas selected out of hydrogen, oxygen, chlorine, and fluorine into a processing chamber 201, and a step of exposing a quartz member 278 in the processing chamber 201 to gas activated with plasma in a low-temperature atmosphere. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
