| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a structure by which a structure of nanometer scale is easily obtained using an anodic oxidation method. SOLUTION: A method of producing a structure includes: a step of forming first projected structures regularly arranged on a substrate and forming a first layer to be anodically oxidized on the substrate having the first projected structures and thereby forming first recessed structures at center portions of cells formed by the arranged first projected structures; a step for removing the first projected structures to form holes; and a step for subjecting the first layer to be anodically oxidized to anodic oxidation to form holes at positions of the first recessed structures. COPYRIGHT: (C)2008,JPO&INPIT |
