| 摘要 |
PROBLEM TO BE SOLVED: To suppress deformation of a shield plate and enable to reflect certainly by making small the temperature distribution of the shield plate under high temperatures. SOLUTION: The back electron-bombardment heating device heats a heating plate 2 by making electrons generated in a filament 9 accelerate and collide from the back of the heating plate 2 which is a top plate of a heating vessel 1, and has a shield plate 11 that is installed at the back of the filament 9 to the heating plate 2 and reflects thermoelectrons and radiant heat to the heating plate 2 side, and this shield plate 11 is made of a conductive ceramic of good thermal conductor. To be more concrete, the shield plate 11 is made of one in which graphite such as thermal-decomposition produced graphite is coated on the surface of graphite. COPYRIGHT: (C)2008,JPO&INPIT
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