| 摘要 |
PROBLEM TO BE SOLVED: To maintain resolution of an oblique pattern while maintaining an optimum thinness of a division width of a rectangular shot. SOLUTION: Fig. 3 shows the results of superposing strip-like rectangular shots 203 conditioned in a length l on the whole trapezoid pattern regions 202. By shifting a dividing position between rectangular shots and other regions, all of the longer sides of strip-like rectangular shots 202 are equal to l or more, and thereby, drawing failure caused by a minute strip-like rectangular shot can be eliminated. COPYRIGHT: (C)2008,JPO&INPIT
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