摘要 |
PROBLEM TO BE SOLVED: To provide an optical device capable of acquiring omnifocal images while controlling data capacity. SOLUTION: This optical device comprises an observation optical system 3 which acquires the images of a test object, a displacement part 42 which displaces the focal position of the observation optical system in the optical axis direction, an image pickup part 35 which picks up the images acquired by the observation optical system, a height detection system 2 which detects the positions in the optical axis direction of a plurality of portions of the test object, a data extraction part which extracts the image data of a portion corresponding to the one from which the position has been detected from the image data of the test object picked up by matching the focal position of the observation optical system 3 to the detected position in the optical axis direction, and an image data composing part which composes a plurality of image data extracted corresponding to the plurality of positions detected with the height detection system. COPYRIGHT: (C)2008,JPO&INPIT
|