摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compound sensor which is miniaturized by reducing the mounted area at the time of detecting angular velocity or acceleration. <P>SOLUTION: The compound sensor comprises: an angular velocity detection element 10 for detecting the angular velocity; an acceleration detector element 12 for detecting the acceleration; an IC 14 for processing the signal outputted from the acceleration detection element 12 or the angular velocity detection element 10; and a package 16 for storing the angular velocity detection element 10, the acceleration detection element 12 and the IC 14, and fixedly arranging the IC 14. They are constituted such that the angular velocity detection element 10 is arranged on the IC 14, and the acceleration detection element 12 is arranged on the angular velocity detection element 10. <P>COPYRIGHT: (C)2008,JPO&INPIT |