| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate-holding device, a method for manufacturing the substrate-holding device and a method for retaining substrate, wherein the substrate can be reinforced and adverse effects on the substrate can be suppressed. <P>SOLUTION: The substrate-holding device 12 is used for reinforcing the strength of a substrate 11, and is fixed to the substrate 11 by a negative pressure. The substrate-holding device 12 has a first holding device 16 and a second holding device 17, which are mutually bonded. The first holding device 16 has a substrate-chucking face 18 serving as a face adhered to the substrate 11, a channel 19 for removing a gas existing between the substrate 11 and the substrate-holding device 12, and a vacuum hole 20. The second holding device 17 has a valve 21, which is bonded to the first holding device 16 to circulate or shut off gas and to retain the substrate 11 by the substrate-holding device 12, and a protrusion which is formed so as to link with the valve 21, for assisting the opening and closing operation of the valve 21. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
