| 摘要 |
PROBLEM TO BE SOLVED: To provide a connection state management system for substrate treating devices that can improve maintainability. SOLUTION: The connection state management system 300 comprises device controllers 270 which are provided to a plurality of substrate treating devices 100 processing wafers 200 respectively and control the respective substrate treating devices 100, and a monitor server 280 which is electrically connected to the respective device controllers 270 for the substrate treating devices 100 through LAN cables 292 and a hub 293. The monitor server 280 has a display screen 314 for displaying states of connections between at least the respective substrate treating devices 100 and monitor server 280 through the LAN cables 292 and hub 293, and a display screen 314 displaying a detailed state of a connection of an element specified by specifying at least one element among the monitor server 280, the respective substrate treating devices 100, LAN cables 292, and hub 293. COPYRIGHT: (C)2008,JPO&INPIT
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