| 摘要 |
PROBLEM TO BE SOLVED: To carry a substrate smoothly regardless of the elevation difference in a conveyance mechanism without requiring the attachment/detachment of a joint mechanism at each conveyance. SOLUTION: A substrate carrier 1 comprises: not less than two floating stages 4A, 4B for floating a flexible sheet-like substrate A; feed mechanisms 5A, 5B for gripping the substrate A being floated by the floating stages 4A, 4B for moving in a conveyance direction B; and a connection section 3 for connecting the floating stages 4A, 4B. The connection section 3 has: fixed rollers 9A, 9B mounted to respective floating stages 4A, 4B; a link 10 mounted so that it can be rocked around an axis in parallel with the rotary axis of the fixed rollers 9A, 9B between the fixed rollers 9A, 9B; and not less than one movable rollers 11 mounted to the link 10. COPYRIGHT: (C)2008,JPO&INPIT
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