| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time required for measuring recesses and protrusions on a measuring object. SOLUTION: The device is equipped with: a microscope 1 for projecting thin line-shaped projection light onto a prescribed measuring position of the measuring object 5 by an objective lens 6; a displacement means 2 for changing the height of the microscope 1 or the measuring object 5 in the optical axis direction of the objective lens 6; an imaging means 3 disposed in an optically conjugate relation with an image formation point of the objective lens 6, for imaging a plurality of images of the projection light on the measuring object 5 through the objective lens 6; and a control means 4 for controlling driving of the displacement means 2, measuring a contrast in each of a plurality of measuring domains divided and set in the direction crossing the projection light in each image of the projection light imaged by the imaging means 3, extracting a variation of the height of the microscope 1 or of the measuring object 5 showing the maximum contrast in each measuring domain, and determining a height distribution along the projection light 15 on the measuring object 5, based on the variation of the height. COPYRIGHT: (C)2008,JPO&INPIT
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