| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To simplify the structure and control of a nitrogen generating apparatus having two adsorption cylinders T1, T2. <P>SOLUTION: The nitrogen generating apparatus 1 can be simplified in constitution so that a rotary valve RV-1 is allowed to repeat a first cylinder pressurization position, a first pressure equalization position, a second cylinder pressurization position, and a second pressure equalization position in this order, and high purity nitrogen gas can be thereby generated, and further, many electromagnetic valves, timers, relays or the like for controlling the electromagnetic valves, and complicated pipe lines for mutually connecting the adsorption cylinders and the electromagnetic valves are not needed. Since high-concentration nitrogen gas is introduced into the second adsorption cylinder T2 in the last half of the first cylinder pressurization position and high-concentration nitrogen gas is introduced into the first adsorption cylinder T1 in the last half of the second cylinder pressurization position by mechanical valves MV1, MV2, the purity of the generated nitrogen gas can be enhanced. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
