| 摘要 |
PROBLEM TO BE SOLVED: To rapidly replace an air between a carriage and a processor with a clean gas and to shorten waiting time up to the delivery of a product. SOLUTION: An outlet 24 is provided at the central part of a shutter 22 that covers the load port 6 of a processor 2 inside the clean room, so as to blow out clean air from the load port 6 to the outside. When an unmanned carrier 4 arrives, air between the unmanned carrier 4 and the shutter 22 is replaced with clean air from the outlet 24. COPYRIGHT: (C)2008,JPO&INPIT
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