| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid transfer device which can prevent separation of a wiring member and damage of a piezoelectric element as much as possible when an external force acts to the wiring member connected to an electrode of a surface of the piezoelectric element, and to provide a manufacturing method for the liquid transfer device. SOLUTION: A plurality of the piezoelectric elements 31 are arranged at regions respectively opposite a plurality of pressure chambers 14 of a face of the opposite side to the pressure chambers 14 of a diaphragm 30. At the same time, a supporting part 36 formed of the same piezoelectric material as that of the plurality of piezoelectric elements 31 is prepared at a region outside of the regions opposite the plurality of pressure chambers 14. An FPC 50 is electrically connected to discrete electrodes 32 arranged at faces of the opposite side to the diaphragm 30 of the plurality of piezoelectric elements 31. Moreover, the FPC 50 is joined also to a face of the opposite side to the diaphragm 30 of the supporting part 36. COPYRIGHT: (C)2008,JPO&INPIT
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