PLANAR HEATER AND SEMICONDUCTOR HEAT TREATMENT APPARATUS PROVIDED WITH THE HEATER

摘要

Provided is a planar heater which suppresses high frequency induction heat by incorporating an earth electrode for suppressing high frequency induction and does not corrode with an excited reaction gas. A semiconductor heat treatment apparatus provided with such planar heater is also provided. A planar heater (1) is provided with a carbon wire heating body (CW) arranged and sealed in planar state inside a silica-glass-board-shaped body (2), and an earth electrode (3) arranged and sealed in a planar state in the silica-glass-board-shaped body (2) above the carbon wire heating body (CW).