Device for evaporating reducing agent e.g reducing agent precursor solution and reducing agent solution, has electrically heated warming zone, which has electrically operated heating element with heating resistor

摘要

The device (1) has an electrically heated warming zone (2), which has an electrically operated heating element (3) with a heating resistor (4), which is self-regulating around a significant temperature. A process of the electrical resistance has a turning point in the connection of the temperature and the conduction of the process of the resistance in the range of the temperature of the turning point has half width. The heating resistor is formed from the materials like a positive temperature coefficient resistance, titanate ceramic, endowed titanate ceramic and a barium titanate ceramic. An independent claim is also included for a method for evaporating a reducing agent e.g reducing agent precursor solution and reducing agent solution.