| 摘要 |
<p>In wafer-level burn-in test, although supply of a sufficient power supply current is required for operating a semiconductor integrated circuit on a wafer, there are some cases where the power supply current exceeds an allowable current quantity due to variance of transistor characteristics of the semiconductor integrated circuit. An operation power supply current is measured during the burn-in test by a current measuring apparatus (3), and based on the measured current value, the operation frequency of an operation signal (13) to be supplied from a signal generating apparatus (5) to the semiconductor integrated circuit to be tested is controlled, and the operation power supply current is controlled.</p> |
