发明名称 MINI-PROBER FOR TFT-LCD TESTING
摘要 An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.
申请公布号 WO2007143326(A3) 申请公布日期 2008.04.03
申请号 WO2007US68642 申请日期 2007.05.10
申请人 APPLIED MATERIALS, INC.;JOHNSTON, BENJAMIN M.;KRISHNASWAMI, SRIRAM;NGUYEN, HUNG T.;BRUNNER, MATTHIAS;LIU, YONG 发明人 JOHNSTON, BENJAMIN M.;KRISHNASWAMI, SRIRAM;NGUYEN, HUNG T.;BRUNNER, MATTHIAS;LIU, YONG
分类号 G01R1/067 主分类号 G01R1/067
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