An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.
申请公布号
WO2007143326(A3)
申请公布日期
2008.04.03
申请号
WO2007US68642
申请日期
2007.05.10
申请人
APPLIED MATERIALS, INC.;JOHNSTON, BENJAMIN M.;KRISHNASWAMI, SRIRAM;NGUYEN, HUNG T.;BRUNNER, MATTHIAS;LIU, YONG
发明人
JOHNSTON, BENJAMIN M.;KRISHNASWAMI, SRIRAM;NGUYEN, HUNG T.;BRUNNER, MATTHIAS;LIU, YONG