| 摘要 |
<P>PROBLEM TO BE SOLVED: To clarify a piezoelectric device showing excellent piezoelectric characteristic from a crystal structure. <P>SOLUTION: This piezoelectric device comprises a piezoelectric element layer having a dielectric element which has a perovskite crystal structure, and an upper electrode and a lower electrode disposed through the piezoelectric element layer. The crystal satisfies the conditions of that the perovskite crystal structure of the piezoelectric element layer is a tetragonal system, a (001) surface azimuth and a (111) surface azimuth are mixed, and that a ratio of orientation rate of a (001) surface azimuth to a film thickness is set larger than the ratio of the orientation rate of the (111) surface azimuth to the film thickness. <P>COPYRIGHT: (C)2008,JPO&INPIT |
