| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To quickly compensate the variation of the optical axis of a laser beam caused by the rotation of a rotator with a simple configuration. <P>SOLUTION: The laser repair apparatus is provided with: a laser oscillator 7; a slit 11 for shaping a laser beam L<SB>1</SB>emitted from the laser oscillator 7; a prism 12 that rotates the laser beam L<SB>1</SB>shaped by the slit 11 around the rotary axis C arranged along the optical axis; an irradiation position detector 6 that detects an irradiation position, in a workpiece A, of the laser beam L<SB>1</SB>transmitted through the prism 12 and emitted to the workpiece A; and a prism translation moving mechanism that moves the prism 12 in the direction crossing the optical axis on the basis of the detection result by the irradiation position detector 6. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
