| 摘要 |
PROBLEM TO BE SOLVED: To shorten a processing time by efficiently controlling a module being a control object. SOLUTION: In an SHF source 20, a plurality of commands transmitted from a tester controller are received through a communication portion 24, and the received plurality of commands are stored in the command buffer 231 of a RAM 23. Next, for each of the plurality of commands, control items corresponding to the command are read out from a control hard processing decision table stored in a memory unit 22 beforehand, and control items corresponding to any one out of the plurality of commands are determined as control items which should be performed. According to the determined control items which should be performed, each control object module is controlled. COPYRIGHT: (C)2008,JPO&INPIT
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