| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor type table device capable of miniaturizing the device and saving a space by suppressing height dimension, and reducing magnetic attraction of a linear motor mechanism to be applied to its interface mounting part by elastically deforming a moving table. SOLUTION: This table device A is provided with a base 2, a linear motion guide device 4, the moving table 6, and the linear motor mechanism 8. The linear motion guide device is provided with a guide rail 40 and a slider 42. The moving table is provided with the interface mounting part 6w for placing thereon an object to be moved with a notch 6s formed into a part of the moving table. By forming the notch, the moving table is formed to be elastically deformed, and elastically deforms and absorbs at least action of attraction acting on a linear motor moving body 82 from a linear motor stator 80 with respect to the moving table. COPYRIGHT: (C)2008,JPO&INPIT
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