发明名称 INTEGRATED INTERMEDIATE ELECTRODE AND PRESSURE GRADIENT TYPE PLASMA GUN
摘要 <p>An integrated intermediate electrode (G) comprises a first conductive housing (11), a first conductive sleeve (12) provided concentrically to the first housing in contact with the inner circumferential surface of the first housing, a first magnet (15) contained in the first housing concentrically thereto, a second conductive housing (17) provided coaxially with the first housing, a second conductive sleeve (18) provided concentrically to the second housing in contact with the inner circumferential surface of the second housing, and a second magnet (21) contained in the second housing concentrically thereto. The first housing and the second housing are integrated through an insulating member (16).</p>
申请公布号 WO2008038467(A1) 申请公布日期 2008.04.03
申请号 WO2007JP65737 申请日期 2007.08.10
申请人 JP 发明人 TERAKURA, ATSUHIRO;MARUNAKA, MASAO;TSUCHIYA, TAKAYUKI
分类号 H05H1/24;C23C14/32 主分类号 H05H1/24
代理机构 代理人
主权项
地址