MINUTE CONTROL MODULE FOR FLOW CONTROLING VALVE AND SPIN SCRUBBER USED THE SAME

摘要

A minute control module of a flow control valve and a spin scrubber using the same are provided to control accurately a flow rate of deionized water to be injected from a deionized water injection nozzle. An extension part is extended from an interrupter body of a flow control valve(190). A rotation reducing unit rotates the extension part according to a predetermined speed-reducing ratio with respect to the same direction as a direction of the interrupter body of the flow control valve. A shaft is formed to receive rotatory power from the outside to rotate the extension part through the rotation reducing unit. A handle is formed to generate rotatory power at an end of the shaft opposite to the rotation reducing unit.