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发明名称
CATADIOPTRIC IMAGING SYSTEM EMPLOYING IMMERSION LIQUID FOR USE IN BROAD BAND MICROSCOPY
摘要
申请公布号
EP1749230(A4)
申请公布日期
2008.04.02
申请号
EP20050731783
申请日期
2005.03.28
申请人
KLA-TENCOR TECHNOLOGIES CORPORATION
发明人
ARMSTRONG, J., JOSEPH;CHUANG, YUNG-HO;SHAFER, DAVID, R.
分类号
G02B17/08;G02B17/02;G02B21/02;G02B21/04;G02B21/33;G03F7/20
主分类号
G02B17/08
代理机构
代理人
主权项
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