HIGH-PURITY ALUMINUM SPUTTER TARGETS,申请号EP20020803163-传众专利搜索

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发明名称	HIGH-PURITY ALUMINUM SPUTTER TARGETS
摘要
申请公布号	EP1444376(A4)	申请公布日期	2008.04.02
申请号	EP20020803163	申请日期	2002.10.23
申请人	PRAXAIR S.T. TECHNOLOGY, INC.	发明人	PERRY, ANDREW, C.;GILMAN, PAUL, S.;HUNT, THOMAS, J.
分类号	C22F1/00;C22F1/04;C23C14/34;(IPC1-7):C22F1/04;C22C21/00	主分类号	C22F1/00
代理机构		代理人
主权项
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