PROBE FOR SHAPE MEASURING APPARATUS, AND SHAPE MEASURING APPARATUS

摘要

There are provided a shape measurement device capable of measuring shapes irrespective of an inclined direction of a side surface without using a complex device configuration, and a shape measurement device probe arranged in the shape measurement device. In the shape measurement device probe, a connecting mechanism (4) for connecting an attachment member (2) and a swinging member (3) includes a supporting point member (42) arranged on the swinging member (3) and a mounting platform (41) arranged on the attachment member (2), and connects the swinging member (3) to the attachment member (2) so as to be inclinable in any direction. The attachment member (2) and the swinging member (3) are configured such that a movable side member (51) arranged on the swinging member (3) and a fixed side member (52) arranged on the attachment member (2) generate magnetic attraction force in a non-contacting state with respect to each other, where the arm of the swinging member (3) is biased so as to be directed in the vertical direction by the magnetic attraction force. According to this configuration, a side surface shape inclined in any direction of XY directions and substantially parallel to the Z-direction can be measured.