| 摘要 |
<p>An overlay measurement method is provided to minimize or remove an overlay measurement error by removing the data measured in a less reliable region according to a standard of the range of a predetermined measurement value. A standard of the range of an overlay measurement data is set in a step for transferring and detecting an overlay mark. Whether flying data detected from the overlay measurement data exceeds the standard of the range of the overlay measurement data is determined. If the flying data exceeds the standard of the range of the overlay measurement data, the flying data is excepted from calculation of the measurement value. A re-calculation is performed on the measurement value. If error data is detected from the overlay measurement data, the detected error data can be filtered.</p> |
