发明名称 Microstructures
摘要 A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.
申请公布号 US7351604(B2) 申请公布日期 2008.04.01
申请号 US20040501516 申请日期 2004.07.14
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CROSS GRAHAM;DESPONT MICHEL;DUERIG URS T.;GENOLET GREGOIRE;SCHLITTLER RETO;VETTIGER PETER
分类号 H01L21/00;B81B3/00;B82B3/00;C01B31/02;G01B7/34;G01Q70/12;G01Q70/16;G11B9/00;G11C23/00 主分类号 H01L21/00
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