发明名称 |
Microstructures |
摘要 |
A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.
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申请公布号 |
US7351604(B2) |
申请公布日期 |
2008.04.01 |
申请号 |
US20040501516 |
申请日期 |
2004.07.14 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CROSS GRAHAM;DESPONT MICHEL;DUERIG URS T.;GENOLET GREGOIRE;SCHLITTLER RETO;VETTIGER PETER |
分类号 |
H01L21/00;B81B3/00;B82B3/00;C01B31/02;G01B7/34;G01Q70/12;G01Q70/16;G11B9/00;G11C23/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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