| 摘要 |
<p>A mask handling apparatus is provided to improve efficiency in a mask manufacturing process by preventing generation of particles. A plurality of holder parts(231) comes in contact with an edge part of a mask substrate(100) to support the mask. A plurality of holder blocks(235) are formed to fix or rotate the mask substrate by fixing or rotating the holder parts. The holder parts are attached to a branch-shaped supporting part(210) to be introduced to both sides of the mask substrate. The holder blocks include a driving motor for rotating the holder parts. The holder blocks include a rotary handle part for rotating the holder parts by a manual operation of an operator.</p> |
