| 摘要 |
A multi-layered dielectric layer and a method for manufacturing a capacitor using the same are provided to reduce a leakage current and enhance a dielectric constant by thickening a third dielectric layer relative to first and second dielectric layers. A second dielectric layer(102) is formed on a first dielectric layer(101), and has a dielectric constant lower than that of the first dielectric layer. A third dielectric layer(103) is formed on the second dielectric layer, and has a dielectric constant higher than that of the second dielectric layer. The third dielectric layer has a thickness thicker than those of the first and second dielectric layers, the first dielectric layer has a thickness thinner than that of the third dielectric layer, and the second dielectric layer has a thickness thinner than that of the first dielectric layer.
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