发明名称 |
Process of making a microtube and microfluidic devices formed therewith |
摘要 |
A process for producing a tube suitable for microfluidic devices. The process uses a uniformly-doped first material having a first portion into which a channel is etched partially through the first material between second and third portions of the first material. The first material is then bonded to a second material so that a first portion of the second material overlies the first portion of the first material and encloses the channel to define a passage. The second and third portions of the second material and part of the second and third portions of the first material are then removed, and the first portion of the second material is bonded to a substrate such that the passage projects over a recess in the substrate surface. The second and third portions of the first material are then removed to define a tube with a freestanding portion.
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申请公布号 |
US7351603(B2) |
申请公布日期 |
2008.04.01 |
申请号 |
US20050161901 |
申请日期 |
2005.08.22 |
申请人 |
INTEGRATED SENSING SYSTEMS, INC. |
发明人 |
SPARKS DOUGLAS RAY;NAJAFI NADER |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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