PLATE CHAMBER AND METHOD FOR FORMING Cu LINE OF SEMICONDUCTOR DEVICE USING BY IT,申请号KR20060071326-传众专利搜索

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发明名称	PLATE CHAMBER AND METHOD FOR FORMING Cu LINE OF SEMICONDUCTOR DEVICE USING BY IT
摘要
申请公布号	KR100818396(B1)	申请公布日期	2008.04.01
申请号	KR20060071326	申请日期	2006.07.28
申请人		发明人
分类号	H01L21/288;H01L21/28;H01L21/304	主分类号	H01L21/288
代理机构		代理人
主权项
地址

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