| 摘要 |
A tool head includes a holder for accommodating a tool and two actuators each of which is connected to the holder via a web. On the one hand, the actuators enable the holder to be deflected by a few micrometers from a resting position and, on the other hand, enable ultrasound to be applied to the holder. For this purpose, the actuators contain a piezoelectric drive. Depending on the application, the tool head can be mounted on a conventional machine tool. The tool head is suitable for many applications, in particular for the production of micro-mechanical structures in the surface of a workpiece.
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