发明名称 Atomic layer deposition of CMOS gates with variable work functions
摘要 Structures, systems and methods for transistors having gates with variable work functions formed by atomic layer deposition are provided. One transistor embodiment includes a first source/drain region, a second source/drain region, and a channel region therebetween. A gate is separated from the channel region by a gate insulator. The gate includes a ternary metallic conductor formed by atomic layer deposition.
申请公布号 US7351628(B2) 申请公布日期 2008.04.01
申请号 US20040929822 申请日期 2004.08.30
申请人 MICRON TECHNOLOGY, INC. 发明人 FORBES LEONARD;AHN KIE Y.
分类号 H01L21/00;H01L21/28;H01L21/285;H01L21/8238;H01L27/092;H01L27/10;H01L29/423;H01L29/49;H01L29/78 主分类号 H01L21/00
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